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· Max, temp : 850 degree C
· Up/down motion : 4" manual motion
· Roration : with motorized
· Heating type : radiation-type
· Substrate size : 4" dia
· Temperature sensor : K-type T/C
· Water cooling heating block
[ Vaccum Component ]
· Capacitance manometer
· 각종 Fitting류
· Flange류
· Quartz tube & Quatrz 가공
- Angle valve/Diaphragm valve/Gate valve etc
