싸이앤텍
PVD
Total 3건 1 페이지
  • 3
    DISCRIPTION

    · Pump : Turbo & rotary pump

    · Base pressure : ~10(-7) Torr

    · Max, temp : about 700 degree C

    · Heating method : Halogen lamp

    · Gas : O2, N2, Ar

    · Pressure control : Manual gate valve & MFC or

    · Pressure control : Automatic pressure control

    · Power : DC(1kW) & RF(13,56MHz, 600W)

  • 2
    DISCRIPTION

    · Purpose : Thin film deposition

    · Pump : Turbo & Rotary pump

    · Base pressure : ~10(-7) Torr

    · E-gun : 4-pocket, 4 cc

    · Power : 6kW with sweep

    · Application : film, cloth, flexible sample coating

  • 1
    DISCRIPTION

    · Purpose : Thin film deposition

    · Pump : Turbo & Rotary pump

    · Base pressure : ~E(-7) Torr

    · Power : AC 1.5W / 2 channel

    · Thickness measureement(QCM)

게시물 검색
주소 : 경기도 수원시 영통구 신원로 306 이노플렉스 1동 303호    |    대표 : 조성원
TEL : 031-224-3280 / 3211    |    FAX : 031-224-5778
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