RF/DC Sputter system
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작성자 관리자 댓글 1건 조회 763회 작성일 19-02-18 14:01본문
· Pump : Turbo & rotary pump
· Base pressure : ~10(-7) Torr
· Max, temp : about 700 degree C
· Heating method : Halogen lamp
· Gas : O2, N2, Ar
· Pressure control : Manual gate valve & MFC or
· Pressure control : Automatic pressure control
· Power : DC(1kW) & RF(13,56MHz, 600W)
