MoS2 TCVD system

· Purpose : MoS2 growing

· Pump : Rotary Oil pump

· Base pressure : ~10(-3) Torr

· Max, temp : 1zone 1,000 degree C

· Max, temp : 2zone 1,000 degree C

· Heating method : Furnace

· Gas : CH4, H2, Ar, H2S

· Automatic pressure control

· auto system

PE TCVD

· Purpose : MoS2 growing

· ICP type Plasma Power 1kw 13.56Mhz

· Pump : Rotary Oil pump

· Base pressure : ~10(-3) Torr

· Max, temp : 1,100 degree C

· Gas : CH4, H2, Ar

· Automatic Pressure control